EUV Lithography Control System
EMCOMO supplies MicroTCA System with CPU, FPGA and multiple SRIO channels
The EUV Lithography Control System is used for optical lithography control applications in the semiconductor industry.
The system is based on the following components:
- 5U 19" MTCA.4 system with 12 full-size single-width AMC slots
- dual redundant universal 110-240V AC power modules with 1.000W each
- MCH with PCIe Gen.3 fabric switch and MCH with SRIO fabric switch
- Intel Xeon processor with 2TB SSD, PCIe Gen.3 and SRIO fabric interface
- Intel Arria-10 FPGA FMC carrier board for customer specific FMC module
- Up to 4 QSFP+/SFP+ carrier boards to connect external SRIO devices
- Interface board with 4x USB 3.0 to connect external USB 3.0 devices
EMCOMO services:
- System design, integration and test
For more information, please contact info@emcomo.de